Preparation of silicon nitride single crystals by chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference8 articles.
1. Silicon Nitride for Microelectric Applications;Milek,1971
2. Some Properties of Vapor Deposited Silicon Nitride Films Using the SiH[sub 4]-NH[sub 3]-H[sub 2] System
3. Silicon Nitride Thin Films from SiCl[sub 4] Plus NH[sub 3]: Preparation and Properties
4. JANAF Thermochemical Tables,1965
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