Author:
Taijing Lu,Toyoda K.,Nango N.,Ogawa T.
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Cited by
20 articles.
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1. Oxygen Precipitation in Silicon;Defects and Impurities in Silicon Materials;2015
2. Misfit dislocations and stresses in GaN epilayers;Applied Physics Letters;1997-10-20
3. Defect inspection of wafers by laser scattering;Materials Science and Engineering: B;1997-02
4. Process- and irradiation-induced defects in silicon devices;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1996-08
5. Computed light scattering cross sections of oxide particles in silicon;Applied Physics Letters;1996-06-03