Technical aspects of InGaAs MOMBE — shutter action, system drift, and material quality
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference6 articles.
1. Alfa Organometallics for vapor phase epitaxy,1986
2. A comparative study of Ga(CH3)3, Ga(C2H5)3 and Ga(C4H9)3 in the low pressure MOCVD of GaAs
3. Incorporation of group III and group V elements in chemical beam epitaxy of GaInAsP alloys
4. InGaAs MOMBE — system drift and material quality
5. Instrumental aspects of atmospheric pressure MOVPE growth of InP and InP: GaInAsP heterostructures
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Silicon shot gas epitaxy: Dose‐controlled digital epitaxy;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-07
2. The growth of InGaAsP by CBE for SCH quantum well lasers operating at 1.55 and 1.4 μm;Journal of Crystal Growth;1992-05
3. The design of an ECR plasma system and its application to InP grown by CBE;Journal of Crystal Growth;1991-05
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