Measurement of gas-switching related diffusion phenomena in horizontal MOCVD reactors using biacetyl luminescence
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference12 articles.
1. Flow patterns in various vertical reactors and movpe growth
2. Vertical versus horizontal reactor: An optical study of the gas phase in a MOCVD reactor
3. Flow Visualization;Merzkirch,1974
4. Flow visualization in low pressure chambers using laser-induced biacetyl phosphorescence
5. Lifetime studies of the biacetyl excited singlet and triplet states in the gas phase at 25.deg.
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Chemical vapour deposition of coatings;Progress in Materials Science;2003
2. Laser-Induced Fluorescence;Optical Diagnostics for Thin Film Processing;1996
3. Improvement of gas-switching abruptness for atmospheric pressure organometallic vapor phase epitaxy;Journal of Crystal Growth;1994-05
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