Full-scale experiments on solid-pellets feed continuous Czochralski growth of silicon crystals-Reference-Cited by-同舟云学术

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Full-scale experiments on solid-pellets feed continuous Czochralski growth of silicon crystals

Published:1996-06 Issue:4 Volume:163 Page:359-368
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Anselmo A.,Koziol J.,Prasad V.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference11 articles.

1. Proc. of the 1992 NSF Design and Manufacturing Systems Conference;Anselmo,1992

2. Proc. of the 1993 NSF Design and Manufacturing Systems Conference;Anselmo,1993

3. PhD Thesis;Anselmo,1994

4. American Conference on Crystal Growth;Anselmo,1993

5. Oscillatory convection in low aspect ratio Czochralski melts

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1. Influence of particle parameters on the melting/migration of silicon particles and turbulent heat transfer during CCZ monocrystalline silicon growth;International Journal of Heat and Mass Transfer;2024-08

2. Influence of Particle Parameters on the Melting/Migration of Silicon Particles and Turbulent Heat Transfer During Ccz Monocrystalline Silicon Growth;2024

3. Numerical study on the effects of inner crucible window heights on the growth of silicon in a continuous Czochralski process;Journal of Crystal Growth;2023-04

4. Controlling the heat, flow, and oxygen transport by double-partitions during continuous Czochralski (CCz) silicon crystal growth;Materials Science in Semiconductor Processing;2023-03

5. Effects of different partition depths on heat and oxygen transport during continuous Czochralski (CCz) silicon crystal growth;Journal of Crystal Growth;2022-04

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