Selective etching and epitaxial refilling of silicon wells in the system SiH4/HCl/H2
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference7 articles.
1. Selective Epitaxial Deposition of Silicon
2. Semiconductor Silicon;Sirtl,1969
3. The combination of two growth methods for the epitaxial deposition of silicon films on insulating substrates
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