Low temperature growth of ZnO film by photo-MOCVD
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference21 articles.
1. High rate epitaxial growth of ZnO films on sapphire by planar magnetron rf sputtering system
2. High-Speed Fabrication of High-Quality Sputtered ZnO Thin-Films for Bulk and Surface Wave Applications
3. Characterization of ZnO piezoelectric films prepared by rf planar‐magnetron sputtering
4. Chemical Vapor Deposition of Single-Crystalline ZnO Film with Smooth Surface on Intermediately Sputtered ZnO Thin Film on Sapphire
5. Optical properties of single‐crystalline ZnO film smoothly chemical‐vapor deposited on intermediately sputtered thin ZnO film on sapphire
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