A mass spectrometric study of AsH3 and PH3 gas sources for molecular beam epitaxy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference15 articles.
1. Molecular Beam Epitaxy of GaAs and InP with Gas Sources for As and P
2. On the use of AsH3in the molecular beam epitaxial growth of GaAs
3. Gas source MBE of InP and GaxIn1−xPyAs1−y : Materials properties and heterostructure lasers
4. Chemical beam epitaxy of InP and GaAs
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