Performance modelling of micromachined sensor membranes coated with piezomagnetic material

Author:

Affane W.,Gibbs M.R.J.,Powell A.L.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Capacitive microphone with a surface micromachined backplate using electroplating technology;Bergqvist;J. Micro-Electro-Mech. Syst.,1994

2. A small-size silicon microphone for measurements in turbulent gas flows;Kalvesten;Sensors and Actuators A,1994

3. Piezomagnetic materials for use in microelectromechanical systems;Gibbs;Proc. IoP Sensors and their Applications Conf.,1995

4. Sensitive, wide frequency range magnetostrictive strain gauge;Wun-Fogle;Sensors and Actuators,1987

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1. Optimizing the Dimensions of an Inverse-Magnetostrictive MEMS Pressure Sensor by Means of an Iterative Finite-Element Scheme;IEEE Transactions on Magnetics;2016-07

2. Frictional moving contact over the surface between a rigid punch and piezomagnetic materials – Terfenol-D as example;International Journal of Solids and Structures;2013-11

3. Chapter Six Magnetic Microelectromechanical Systems: MagMEMS;Handbook of Magnetic Materials;2007

4. Applications of magmems;Journal of Magnetism and Magnetic Materials;2005-04

5. Magnetic materials for MEMS applications;Journal of Physics D: Applied Physics;2004-10-29

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