Low-cost high-sensitivity integrated pressure and temperature sensor-Reference-Cited by-同舟云学术

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Low-cost high-sensitivity integrated pressure and temperature sensor

Published:1994-04 Issue:1-3 Volume:42 Page:398-401
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Pons P.,Blasquez G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference3 articles.

1. A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity;Lee;IEEE Trans. Electron Devices,1982

2. Thermo-resistive sensors;Popescu,1992

3. Feasibility of capacitive pressure sensor without compensation circuit;Blasquez;Sensors and Actuators A,1993

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characterisation and modelling analysis of a capacitive pressure sensor based on a silicon/Pyrex sensing cell and a BiCMOS A/D integrated circuit;Sensors and Actuators A: Physical;2000-08

2. The Seebeck coefficient of monocrystalline alpha-SiC and polycrystalline beta-SiC measured at 300-533 K;Semiconductor Science and Technology;1999-12-09

3. Adaptive quantization and fault detection in smart sensors;Sensors and Actuators A: Physical;1995-03

4. Influence of the bonding conditions on the response of capacitive pressure sensors;Sensors and Actuators A: Physical;1995-01

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