A simulation tool for mechanical sensor design-Reference-Cited by-同舟云学术

A simulation tool for mechanical sensor design

Published:1992-04 Issue:1-3 Volume:32 Page:521-524
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Folkmer B.,Offereins H.L.,Sandmaier H.,Lang W.,Seidl A.,Groth P.,Pressmar R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Dickschicht-Drucksensoren: Simulation der mechanischen Eigenschaften und spezielle Anforderungen an Dickschichtpasten, Sensoren in Dickschichttechnik;Sandmaier;Tech. Mess.,1989

2. Non-linear analytical modelling of bossed diaphragms for pressure sensors;Sandmaier;Sensors and Actuators A,1991

3. Untersuchung des nichtlinearen Verhaltens piezoresistiver Niederdrucksensoren auf der Basis von Silizium;Sandmaier,1988

4. A simulation program for solid state pressure sensors;Lee;IEEE Trans. Electron. Devices,1982

5. CAPPS: thin diaphragm capacitive pressure sensor simulator;Bin;Sensors and Actuators,1987

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