1. Micromachines on the march;Bryzek;IEEE Spectrum,1994
2. Silicon accelerometer with new thermal self-test mechanism;Pourahmadi,1992
3. Integrated, complete, affordable accelerometer for air-bag applications;Sherman,1992
4. Accelerometer systems with built-in testing;Allen;Sensors and Actuators,1991
5. Deformable-mirror spatial light modulator;Hornbeck;SPIE Critical Review, Spatial Light Modulators and Applications III,1991