Fiber-optic displacement sensor with 0.02 μm resolution by white-light interferometry

Author:

Koch Andreas,Ulrich Reinhard

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. High-accuracy position-sensing with fiber-coupled white-light interferometers;Bosselmann;Proc. 2nd Int. Conf. Optical Fiber Sensors Stuttgart, F.R.G.,1984

2. Theory of spectral encoding for fiber-optic sensors;Ulrich,1987

3. Nouvelle méthode de mesure de la visibilité de la modulation spectrale pour de grandes différences de marché;Delisle;Can. J. Phys.,1972

4. Remote displacement measurement using a passive interferometer with a fiber-optic link;Beheim;Appl. Opt.,1985

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1. Review of Fiber Optic Displacement Sensors;IEEE Transactions on Instrumentation and Measurement;2022

2. Phase sensitive low-coherence interferometry using microwave photonics;Optics Express;2020-09-28

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4. White Light Interferometry;Handbook of Advanced Nondestructive Evaluation;2019

5. A review of interferometry for geometric measurement;Measurement Science and Technology;2018-09-05

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