Process alternatives and scaling limits for high-density silicon tactile imagers-Reference-Cited by-同舟云学术

Process alternatives and scaling limits for high-density silicon tactile imagers

Published:1990-04 Issue:1-3 Volume:23 Page:915-918
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Suzuki K.,Najafi K.,Wise K.D.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Scaling limits in batch-fabricated silicon prenure sensors;Chau;IEEE Trans. Ekctron Devices, ED-34,1987

2. High-resolution silicon pressure imager with CMOS processing circuits;Sugiyama;Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

3. A 1024-element high-performance silicon tactile imager;Suzuki;Tech. Digest, IEEE '88 IEDM,1988

4. Resonant-microbridge vapor sensor;Howe;IEEE Trans. FJectron Devices, ED-33,1986

5. Silicon fusion bonding for pressure sensors, Tech. Digest;Petersen;IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, U.S.A.,1988

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