A high-performance microflowmeter with built-in self test

Author:

Cho Steve T.,Wise Kensall D.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. An ultrasensitive silicon pressure-based microflow sensor;Cho;IEEE Trans. Electron Devices,1992

2. Internal stress compensation and scaling of ultrasensitive silicon pressure sensors;Cho;IEEE Trans. Electron Devices,1992

3. Secondary sensitivities and stability of ultrasensitive silicon pressure sensors;Cho;Tech. Digest, Solid-State Sensor Workshop, Hilton Head, Island, SC, USA,1990

4. A monolithic capacitive pressure sensor with pulsed-period output;Sander;IEEE Trans. Electron Devices,1980

5. A high resolution capacitance to frequency converter;Krummenacher;IEEE J. Solid-State Circuits,1985

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