Resonator-based touch-sensitive probe

Author:

Harb S.M.,Vidic M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Renishaw CMM Product Group 'General Product', Renishaw Precision Metrology and Insp. Equip.;Bulletin No. 4,1992

2. Resonator sensors - a review;Langdon;J. Phys. E: Sci. Instrum.,1985

3. Sensors with oscillating elements;Gast;J. Phys. E: Sci. Instrum.,1985

4. Simple piezoelectric microbalance based on a vibrating quartz wire;Mulder;J. Phys. E: Sci. Instrum.,1984

5. Resonant pressure sensor based on piezoelectric properties of ferroelectric thick films;Morten;Sensors and Actuators A,1992

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