A piezoresistive humidity sensor-Reference-Cited by-同舟云学术

A piezoresistive humidity sensor

Published:1994-05 Issue:1-3 Volume:43 Page:181-184
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Gerlach G.,Sager K.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Sensoren und Meßgeräte für Gasfeuchte;Scholz;Techn. Mess.,1992

2. Humidity sensors: principles and applications;Yamazoe;Sensors and Actuators,1986

3. G. Gerlach, G. Pfeifer and F.-M. Schmidt, Feuchtesensor, Ger. Patent No. DD 236 173 (May 28, 1986)

4. Entwurf und Herstellungstechnologie des piezoresistiven Miniaturdruckaufnehmers IBW 88;Kühne,1988

5. Spannungsfelder in endlichen Rechteckplatten;Menzel;Feingerätechnik,1982

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