Author:
Kádár Zsolt,Kindt Wilko,Bossche Andre,Mollinger Jeff
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. The theory of oscillating-vane vacuum gauges;Christian;Vacuum,1966
2. Theoretical and experimental investigations on silicon single crystal resonant structures;Buser,1989
3. Characteristic of polysilicon resonant microbeams;Zook;Sensors and Actuators A,1992
4. Dynamics of Gas-Surface Scattering;Goodman,1976
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