Tactile microgripper for automated handling of microparts-Reference-Cited by-同舟云学术

Tactile microgripper for automated handling of microparts

Published:1996-05 Issue:1-3 Volume:53 Page:410-415
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Greitmann Georg,Buser Rudolf A

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. High precision robots for automated handling of microparts;Codourey,1994

2. Microtools for nanorobots;Greitmann,1994

3. Overhung electrostatic microgripper;Kim,1991

4. Selective chemical vapor deposition of tungsten for microelectromechanical structures;Macdonald;Sensors and Actuators,1989

5. Thermally excited silicon microactuators;Riethmüller;IEEE Trans. Electron Devices,1988

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