An integrated optical position-sensitive detector with digital output and error correction-Reference-Cited by-同舟云学术

An integrated optical position-sensitive detector with digital output and error correction

Published:1994-03 Issue:3 Volume:40 Page:237-242
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Riedijk F.R.,Smith T.,Huijsing J.H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Sensors with digital or frequency output;Middelhoek;Sensors and Actuators,1988

2. A linear high-performance PSD displacement transducer with microcontroller interfacing;Meijer;Sensors and Actuators,1990

3. An integrated position sensor using JFETs as a buffer for PSD output signal;Muro;Sensors and Actuators,1990

4. Fabrication and performance of a fully integrated micro-Pirani pressure gauge with digital readout;Mastrangelo;Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA,24281991

5. An integrated absolute temperature sensor with digital output;Riedijk;Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA,24281991

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Linear, Millimetre Displacement-to-Frequency Transducer;Sensors;2012-08-06

2. Characterisation of 1D opto-electronic sensors and their application to angular self-centring probes for machine-tool verification;Measurement;2008-12

3. Digital output silicon optical sensors;Sensors and Actuators A: Physical;2008-03

4. Thin Film Position Sensitive Detectors: From 1D to 3D Applications;Technology and Applications of Amorphous Silicon;2000

5. Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon;Thin Solid Films;1996-01