Static friction of diamond-like carbon film in MEMS-Reference-Cited by-同舟云学术

Static friction of diamond-like carbon film in MEMS

Published:1992-10 Issue:1 Volume:35 Page:45-50
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Deng Keren,Ko Wen H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

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2. Friction study of IC-processed micromotors;Tai;Sensors and Actuators,1990

3. Microfabricated silicon electric mechanisms;Mehregany,1990

4. A preliminary study on friction measurement in MEMS;Deng;Tech. Digest, 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco CA, USA,24281991

5. A study of static friction between silicon and silicon compounds;Deng;J. Micromech. Microeng.,1992

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