Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. The original development of this sensor was carried out at STL (now BNR Europe), Harlow, UK.
2. A miniature silicon resonant pressure sensor;Greenwood;IEE Proc.,1988
3. J.C. Greenwood, Br. Patent No. 1588669 (1978).
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