Author:
Rosengren L.,Smith L.,Bäcklund Y.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Micromachining processes and structures in microoptics and optoelectronics;Deimel;J. Micromech. Microeng.,1991
2. Hybrid integration of semiconductor lasers with Si-based single-mode ridge waveguides;Friedrich;J. Lightwave Tech.,1992
3. Passive coupling of InGaAsP/InP laser array and singlemode fibres using silicon waferboard;Armiento;Electron. Lett.,1991
4. Realization of a mesa array in (001) oriented silicon wafers for tactile sensing applications;Buser;Ext. Abstr., Electrochem. Soc. Fall Meet., San Diego, CA, USA,1986
5. Mesa structure formation using potassium hydroxide and ethylene diamine based etchants;Chang;Tech. Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA,1988
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