Laser-recrystallized polysilicon layers in sensors-Reference-Cited by-同舟云学术

Laser-recrystallized polysilicon layers in sensors

Published:1992-01 Issue:1-2 Volume:30 Page:143-147
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Voronin V.A.,Druzhinin A.A.,Marjamova I.I.,Kostur V.G.,Pankov Ju.M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Silicon in mechanical sensors;Greenwood;J. Phys. E: Sci. Instrum.,1988

2. Laser-recrystallized polysilicon resistors for sensing and integrated circuits applications;Binder;Sensors and Actuators,1983

3. Piezoresistance in polysilicon and its application to strain gauges;French;Solid-State Electron,1989

4. Polysilicon SOI pressure sensor;Suski;Sensors and Actuators,1989

5. Polysilicon recrystallization of insulated substrates by laser irradiation;Druzhinin;Phys. Elektron.,1988

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