Author:
Gumenjuk S.V.,Podlepetsky B.I.,Kremliov V.V.,Polyanskykh N.A.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. History of Early Research on MEMS in Russia (U.S.S.R.);NATO Science for Peace and Security Series B: Physics and Biophysics;2010
2. Advanced integrated magnetic-field sensors with frequency output;Sensors and Actuators A: Physical;1997-07