SOS strain gauge sensors for force and pressure transducers

Author:

Stuchebnikov V.M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Semiconductor strain gage transducers for force and pressure measurement using heteroepitaxial layers of silicon on sapphire;Beloglazov;Prib. Sist. Upr. (Control Instrum. Syst.),1982

2. Transducers make use of SOS diaphragms;Allan;Electronics,1979

3. A diffused silicon pressure transducer with stress concentrated at transverse gages;Wilner;ISA Trans.,1978

4. Dimensioning of temperature-compensated silicon pressure gauges;Kiss;Acta Tech. Acad. Sci. Hung.,1979

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