Silicon whiskers for mechanical sensors-Reference-Cited by-同舟云学术

Silicon whiskers for mechanical sensors

Published:1992-01 Issue:1-2 Volume:30 Page:27-33
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Voronin V.,Maryamova I.,Zaganyach Y.,Karetnikova E.,Kutrakov A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Silicon in mechanical sensors;Greenwood;J. Phys. E: Sci. Instrum.,1983

2. Integrated silicon sensors;Middelhoek;Proc. 12th Ann. School Semiconductions Lasers, Microwave IC and Satellite Television, Microelectronic Sensors, Sozopol,Bulgaria,1989

3. Topology of heterogeneous equilibrium and thermodynamics of CVD processes;Voronin;Proc. 5th European Conf. on Chemical Vapour Deposition, Upsala, Sweden,17201985

4. Whiskers for new technique;Maryamova;Proc. III Soviet Conf. on Whiskers for New Techniques, Vorenege, U.S.S.R.,1979

5. Investigation of piezoresistance in p-type Si at low temperatures;Maryamova;Phys. Electronics, No. 26. Lvov,1983

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