Performance limitations of surface-machined accelerometers fabricated in polysilicon gate material-Reference-Cited by-同舟云学术

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Performance limitations of surface-machined accelerometers fabricated in polysilicon gate material

Published:1995-01 Issue:1-3 Volume:46 Page:205-209
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ward M.C.L.,King D.O.,Hodge A.M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Surface micromachining;Linder;J. Micromech. Microeng.,1992

2. Silicon as a mechanical material;Petersen;Proc. IEEE,1982

3. ADLX50 Data Sheet, Analog Devices Inc., One Technology Way, PO Box 9106, Norwood, MA 02062-9106, USA

4. Lucas Novasensor, 1055 Mission Court, Fremont, CA 94539, USA

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1. Druck-, Kraft-, Drehmoment- und Inertialsensoren;Sensortechnik;2014

2. Characterization of frequency tuning using focused ion beam platinum deposition;Journal of Micromechanics and Microengineering;2006-12-22

3. Design and analysis of an intensity modulated micro-opto-electro-mechanical accelerometer based on nonuniform cantilever beam proof mass;Journal of Micro/Nanolithography, MEMS, and MOEMS;2006-10-01

4. Silicon-micromachined accelerometers for space inertial systems;SPIE Proceedings;1999-11-09

5. Kraft, Drehmoment, Beschleunigung;Sensortechnik;1998

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