Author:
Semmache B.,Kleimann P.,Le Berre M.,Lemiti M.,Barbier D.,Pinard P.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. Piezoresistive pressure sensors based on polycrystalline silicon;Mosser;Sensors and Actuators A,1991
2. Polysilicon as a material for microsensor applications;Obermeier;Sensors and Actuators A,1992
3. RTP: key to future semiconductor fabrication;Moslehi;Solid State Technol.,1994
4. Manufacturability issues in rapid thermal chemical vapour deposition;Öztürck;IEEE Trans. Semicond. Manuf.,1991
Cited by
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