Electrically trimmable silicon micromachined pressure switch-Reference-Cited by-同舟云学术

Electrically trimmable silicon micromachined pressure switch

Published:1990-02 Issue:1-3 Volume:21 Page:54-57
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

De Bruin D.W.,Allen H.V.,Terry S.C.,Jerman J.H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference2 articles.

1. A monilithic silicon switch system for tire pressure measurement;Terry;Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

2. Henry V. Allen et al., IC Sensors, Microminiature force sensitive switch, U.S. Patent 4 737 660 (Apr. 1988)

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