Accelerometer systems with built-in testing-Reference-Cited by-同舟云学术

Accelerometer systems with built-in testing

Published:1990-02 Issue:1-3 Volume:21 Page:381-386
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Allen Henry V.,Terry Stephen C.,De Bruin Diederik W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. A batch-fabricated silicon accelerometer;Roylance;IEEE Trans. Electron Devices, ED-26,1979

2. A silicon based micromechanical accelerometer with cross acceleration sensitivity compensation;Sandmaier;Tech. Digest, Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

3. A miniature silicon accelerometer with built-in damping;Terry;Tech. Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, U.S.A.,691988

4. Microwave threshold accelerometer development;Glenn;U.S. Army Laboratory Command, Harry Diamond Laboratories, HDL-CR-145-86-1,1986

5. Accelerometer systems with self-testable features;Allen;Sensors and Actuators,1989

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