Author:
Boxenhorn Burton,Greiff Paul
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. A vibratory micromechanical gyroscope;Boxenhorn;AIAA Guidance Navigation and Control Conf., Minneapolis, MN, U.S.A.,15171988
2. An electrostatically rebalanced micromechanical accelerometer;Boxenhorn;AIAA Guidance Navigation and Control Conf., Boston, MA, U.S.A.,141989
3. The controlled etching of silicon in catalyzed ethylenediamine-pyrocatechol-water solutions;Reisman;J. Electrochem. Soc.,1979
4. Optical measurement of silicon membrane and beam thickness using a reflectance spectrometer;Bernstein;IEEE Trans. Electron Devices,1988
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