Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials-Reference-Cited by-同舟云学术

Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials

Published:1995-05 Issue:1 Volume:48 Page:37-46
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Steinmann R.,Friemann H.,Prescher C.,Schellin R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Surface micromachined pressure transducers;Guckel;Sensors and Actuators A,1991

2. SENSIM: a simulation program for solid state pressure sensors;Lee;IEEE Trans. Electron Devices,1982

3. The influence of tensile forces on the deflection of circular diaphragms in pressure sensors;Voorthuyzen;Sensors and Actuators,1984

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