1. Controlled stepwise motion in polysilicon microstructures;Akiyama;J. Microelectromech. Syst,1993
2. Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS;Akiyama;J. Microelectromech. Syst,1997
3. Beam-steering micromirrors for large optical cross-connects;Aksyuk;J. Lightwave Tech,2003
4. Electrostatic motors;Bollee;Philips Tech. Rev,1969
5. Optical iMEMS: A fabrication process for MEMS optical switches with integrated on-chip electronics;Brosnihan,2003