Second use or recycling of hydrogen waste gas from the semiconductor industry - Economic analysis and technical demonstration of possible pathways-Reference-Cited by-同舟云学术

Second use or recycling of hydrogen waste gas from the semiconductor industry - Economic analysis and technical demonstration of possible pathways

Published:2019-06 Issue:31 Volume:44 Page:17168-17184
ISSN:0360-3199
Container-title:International Journal of Hydrogen Energy
language:en
Short-container-title:International Journal of Hydrogen Energy

Author:

Rochlitz L.,Steinberger M.,Oechsner R.,Weber A.,Schmitz S.,Schillinger K.,Wolff M.,Bayler A.

Funder

German Federal Ministry for Economic Affairs and Energy

Bavarian Ministry of Economic Affairs, Regional Development and Energy

Publisher

Elsevier BV

Subject

Energy Engineering and Power Technology,Condensed Matter Physics,Fuel Technology,Renewable Energy, Sustainability and the Environment

Reference24 articles.

1. EUV tools: hydrogen gas purification and recovery strategies;Landoni,2015

2. Silicon carbide epitaxy;La Via,2012

3. EUV lithography adds to increasing hydrogen demand at leading-edge fabs. Solid State Technology;Stockman,2018

4. Estimations generated during research at Fraunhofer IISB;Steinberger,2018

5. Verstromung von wasserstoffreichen Gasgemischen mit PEM-Brennstoffzellen am Beispiel einer Epitaxieanlage. (Conversion of hydrogen-rich gases form an epitaxy tool into electricity via PEM fuel cells.) Dissertation Universität Erlangen-Nürnberg;Steinberger,2018

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Performance investigation of cross-regional utilization and production of renewable hydrogen;Applied Thermal Engineering;2024-04

2. Review of Catalysts, Substrates, and Fabrication Methods in Catalytic Hydrogen Combustion with Further Challenges and Applications;Energy & Fuels;2024-03-05

3. An insight into separating H₂ from natural gas/H₂ mixtures using Mg-based systems;Journal of Materials Chemistry A;2024

4. Blue hydrogen production from natural gas reservoirs: A review of application and feasibility;Journal of CO2 Utilization;2023-04

5. Electrochemical hydrogen compressor: Recent progress and challenges;International Journal of Hydrogen Energy;2022-07