Effect of surface crack on nanoimprint process of Al thin film
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference24 articles.
1. Imprint of sub‐25 nm vias and trenches in polymers
2. Imprint lithography with sub-10 nm feature size and high throughput
3. Nanoimprint lithography
4. Molecular dynamics study of the nanoimprint process on bi-crystal Al thin films with twin boundaries
5. Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process
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1. Phase transformation and microstructure evolution of nanoimprinted NiCoCr medium entropy alloys;Journal of Alloys and Compounds;2022-02
2. Residual stress and elastic recovery of imprinted Cu-Zr metallic glass films using molecular dynamic simulation;Computational Materials Science;2019-12
3. Microscopic properties of a nanocrystal aluminum thin film during nanoimprint using quasi-continuous method;Thin Solid Films;2016-08
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