Experimental and theoretical insights on the structural and optical properties of GeOx thin films deposited via RF magnetron sputtering under varying oxygen percentage-Reference-Cited by-同舟云学术

Experimental and theoretical insights on the structural and optical properties of GeOx thin films deposited via RF magnetron sputtering under varying oxygen percentage

Published:2023-02 Issue: Volume:650 Page:414494
ISSN:0921-4526
Container-title:Physica B: Condensed Matter
language:en
Short-container-title:Physica B: Condensed Matter

Author:

Şenadım Tüzemen E.,Hopoğlu H.,Sarıtaş S.,Aydınoğlu H.S.,Ertuğrul M.,Maslov M.M.^ORCID,Kaya S.,Ungan F.^ORCID,Gür E.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference64 articles.

1. Electrical properties of nanocrystalline GaN film prepared by magnetron sputtering;Zhang;J. Alloys Compd.,2009

2. Highly-detective tunable band-selective photodetector based on RF sputtered amorphous SiC thin-film: effect of sputtering power;Ferhati;J. Alloys Compd.,2022

3. Influence of radio frequency magnetron sputtering parameters on the structure and performance of SiC films;Liu;Ceram. Int.,2021

4. Gallium oxide films deposition by RF magnetron sputtering; a detailed analysis on the effects of deposition pressure and sputtering power and annealing;Mobtakeri;Ceram. Int.,2021

5. Optical and structural characterization of high crystalline β-Ga2O3 films prepared using an RF magnetron sputtering;Patil;J. Alloys Compd.,2022

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical properties of NiO films: Effect of nitrogen-doping, substrate temperature and band gap estimation using machine learning;Materials Science and Engineering: B;2024-09