Experimental and theoretical insights on the structural and optical properties of GeOx thin films deposited via RF magnetron sputtering under varying oxygen percentage
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference64 articles.
1. Electrical properties of nanocrystalline GaN film prepared by magnetron sputtering;Zhang;J. Alloys Compd.,2009
2. Highly-detective tunable band-selective photodetector based on RF sputtered amorphous SiC thin-film: effect of sputtering power;Ferhati;J. Alloys Compd.,2022
3. Influence of radio frequency magnetron sputtering parameters on the structure and performance of SiC films;Liu;Ceram. Int.,2021
4. Gallium oxide films deposition by RF magnetron sputtering; a detailed analysis on the effects of deposition pressure and sputtering power and annealing;Mobtakeri;Ceram. Int.,2021
5. Optical and structural characterization of high crystalline β-Ga2O3 films prepared using an RF magnetron sputtering;Patil;J. Alloys Compd.,2022
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