Gas-Phase Cleaning for Removal of Surface Contaminants

Author:

Kohli Rajiv

Publisher

Elsevier

Reference396 articles.

1. The U.S. Solvent Cleaning Industry and the Transition to Non Ozone Depleting Substances;EPA,2004

2. EPA, “Phaseout of Ozone-Depleting Substances”, U.S. Environmental Protection Agency, Washington, D.C. (2016). https://www.epa.gov/ods-phaseout.

3. Cleaning with Solvents;Durkee,2016

4. Handbook of Silicon Wafer Cleaning Technology,2008

5. Handbook for Critical Cleaning,2011

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1. Air Quality Matters: A Holistic Strategy and Approach to HVAC System Validation in Pharmaceuticals;International Journal of Innovative Science and Research Technology (IJISRT);2024-08-13

2. RF plasma cleaning of silicon substrates with high-density polyethylene contamination;Japanese Journal of Applied Physics;2017-11-14

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