Basic technologies for microsystems-Reference-Cited by-同舟云学术

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Basic technologies for microsystems

Published:2016 Issue: Volume: Page:11-54
ISSN:
Container-title:Nano- and Microfabrication for Industrial and Biomedical Applications
language:
Short-container-title:

Author:

Luttge Regina

Publisher

Elsevier

Reference101 articles.

1. Fundamentals of Microfabrication;Madou,1997

2. Micro-Nanofabrication;Cui,2005

3. Handbook of VLSI Microlithography,1991

4. ULSI Technology,1996

5. Multi-electron beam systems;Kruit,2009

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Cost-Effective Fabrication of Polydimethylsiloxane (PDMS) Microfluidics for Point-of-Care Application;International Journal of Nanoelectronics and Materials (IJNeaM);2024-06-12

2. A Novel In Vitro Wound Healing Assay Using Free-Standing, Ultra-Thin PDMS Membranes;Membranes;2022-12-24

3. Micropunched microholes potential for bioapplications;MOJ Applied Bionics and Biomechanics;2018-06-28

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