Epitaxial ZnO piezoelectric thin films for saw filters
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference17 articles.
1. Structural, optical, and surface acoustic wave properties of epitaxial ZnO films grown on (011̄2) sapphire by metalorganic chemical vapor deposition
2. ZnO films on {001}-cut <110>-propagating GaAs substrates for surface acoustic wave device applications
3. High quality ZnO thin films on InP substrates prepared by radio frequency magnetron sputtering. II. Surface acoustic wave device fabrication
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