Cluster ion beam processing

Author:

Yamada Isao,Matsuo Jiro

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference30 articles.

1. Yamada I, Proc. 14th Symp. on Ion Sources and Ion-Assisted Technology, Tokyo. Tokyo: The Ion Engineering Society of Japan, 1991:227–235

2. Yamada I, Matsuo J. Ion solid interactions for materials modification and processing. In: Pocker DB, Illa D, Cheng YT, Harriott LR, Sigmon TW, editors. Materials Research Society Symposium Proceedings, vol. 396. Pittsburgh: Materials Research Society, 1996:149–154

3. Yamada I, Matsuo J. Advanced metallization for future ULSI. In: Tu KN, Poate JM, Mayer JW, Chen LC, editors. 1996 Materials Research Society Symposium Proceedings, vol. 427. Pittsburgh: Materials Research Society, 1997:265–276

4. Yamada I, Matsuo J, Jones EC, Takeuchi D, Aoki T, Goto K, Sugii T. Materials modification and synthesis by ion beam processing. In: Alexander D, Park B, Cheung N, Skorupa W, editors. Materials Research Society Symposium Proceedings, vol. 438. Pittsburgh: Materials Research Society, 1997:368–374

5. Goto K, Matsuo J, Sugii T, Minakata H, Yamada I, Hisatugu T. IEDM Tech. Dig. 1996: 435

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