Author:
Tillmann A,Buschbaum S,Frigge S,Kreiser U,Löffelmacher D,Theilig T,Schmid P
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference4 articles.
1. Tillmann A. Model based temperature uniformity control during rapid thermal processing. In: Proceedings RTP'96
2. Application Note 6 `Simulation of wafer rotation'; Tomerdingen, Germany: Boin GmbH
3. Tillmann A, et al., Transient thermal behavior in a new RTP chamber. In: Proceedings TMS'98
4. Accurate Estimation of Radiative and Convective Losses in a Multizone RTP Reactor
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