Study of the effect of non-planarity and defects on the geometrical accuracy of semiconductor surface structures using a CA

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Study of the effect of non-planarity and defects on the geometrical accuracy of semiconductor surface structures using a CA_TCAD system

Published:2001-03 Issue:1-3 Volume:80 Page:68-72
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Sirakoulis G.Ch.,Karafyllidis I.,Thanailakis A.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference18 articles.

1. M. Meyyappan, Computational Modeling in Semiconductor Processing, Artech House, Boston, 1995.

2. Handbook of Numerical Heat Transfer;Minkowcyz,1988

3. Theory of Self-Reproducing Automata;von Neumann,1966

4. Statistical mechanics of cellular automata

5. Modeling Nature, Cellular Automata Simulations;Gaylord,1996

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A TCAD system for VLSI implementation of the CVD process using VHDL;Integration;2004-02

2. A CAD system for the construction and VLSI implementation of Cellular Automata algorithms using VHDL;Microprocessors and Microsystems;2003-09

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