Shock wave emission upon spherical bubble collapse during cavitation-induced megasonic surface cleaning
Author:
Publisher
Elsevier BV
Subject
Acoustics and Ultrasonics,Radiology Nuclear Medicine and imaging,Chemical Engineering (miscellaneous),Inorganic Chemistry,Organic Chemistry,Environmental Chemistry
Reference20 articles.
1. Evaluation of Megasonic Cleaning for Sub-90nm Technologies
2. Fundamentals of Multiphase Flow;Brennen,2005
3. Acoustic cavitation
4. Cavitation produced by Ultrasonics
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