Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning-Reference-Cited by-同舟云学术

Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning

Published:2014-07 Issue:4 Volume:21 Page:1496-1503
ISSN:1350-4177
Container-title:Ultrasonics Sonochemistry
language:en
Short-container-title:Ultrasonics Sonochemistry

Author:

Kang Bong-Kyun,Kim Min-Su,Park Jin-Goo

Funder

National Research Foundation of Korea

Korea government

Ministry of Knowledge Economy

Publisher

Elsevier BV

Subject

Acoustics and Ultrasonics,Radiology, Nuclear Medicine and imaging,Chemical Engineering (miscellaneous),Inorganic Chemistry,Organic Chemistry,Environmental Chemistry

Reference50 articles.

1. Using sonochemistry for the fabrication of nanomaterials;Gedanken;Ultrason. Sonochem.,2004

2. Sonochemistry: science and engineering;Thompson;Ind. Eng. Chem. Res.,1999

3. Influence of concentration of substances used in ultrasonic cleaning in alkaline solutions on cavitation intensity;Niemczewski;Ultrason. Sonochem.,2009

4. Effect of power and frequency on bubble-size distributions in acoustic cavitation;Brotchie;Phys. Rev. Lett.,2009

5. Jet formation and shock wave emission during collapse of ultrasound-induced cavitation bubbles and their role in the therapeutic applications of high-intensity focused ultrasound;Brujan;Phys. Med. Biol.,2005

Cited by 44 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Sonochemistry for materials synthesis and catalysis;Nanoscience;2024-09-04

2. Effects of Gas-Dissolved Water for Ceria Nanoparticles on the SiO₂ Film Surface in Post-CMP Cleaning;ECS Journal of Solid State Science and Technology;2024-05-01

3. Review—Post-Chemical Mechanical Planarization Cleaning Technology;ECS Journal of Solid State Science and Technology;2023-11-01

4. Molecular dynamics simulation of ultrasound cavitation occurring in copper–water nanofluid;Physics of Fluids;2023-10-01

5. Large physical simulation test of cavitation reservoir stimulation;Geoenergy Science and Engineering;2023-08