Structural and mechanical evolution of reactively and non-reactively sputtered Zr–Al–N thin films during annealing
Author:
Funder
START
Austrian Science Fund
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference55 articles.
1. Thermal stability of nitride thin films
2. Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminum
3. Microstructural design of hard coatings
4. Decorative hard coatings with improved corrosion resistance
5. The influence of the ion bombardment on the optical properties of TiNx and ZrNx coatings
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