Growth and properties of amorphous Ti–B–Si–N thin films deposited by hybrid HIPIMS/DC-magnetron co-sputtering from TiB2 and Si targets-Reference-Cited by-同舟云学术

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Growth and properties of amorphous Ti–B–Si–N thin films deposited by hybrid HIPIMS/DC-magnetron co-sputtering from TiB2 and Si targets

Published:2014-11 Issue: Volume:259 Page:442-447
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Fager H.,Greczynski G.,Jensen J.,Lu J.,Hultman L.

Funder

Swedish Research Council

SSF-project Designed Multicomponent Coatings, MultiFilms

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference46 articles.

1. Ti-Si-N films prepared by plasma-enhanced chemical vapor deposition

2. Mechanical and tribological characterization of low-temperature deposited PVD TiN coatings

3. Influence of Si on the microstructure of arc evaporated (Ti,Si)N thin films; evidence for cubic solid solutions and their thermal stability

4. Thermal stability of arc evaporated high aluminum-content Ti1−xAlxN thin films

5. Oxidation of metastable single‐phase polycrystalline Ti0.5Al0.5N films: Kinetics and mechanisms

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1. HiPIMS co-sputtering for the increase of the mechanical properties of arc deposited TiN coatings;Journal of Materials Research and Technology;2023-09

2. A step-by-step guide to perform x-ray photoelectron spectroscopy;Journal of Applied Physics;2022-07-07

3. Effect of modulation period on structure and mechanical properties of WB2/a-WBC films deposited by direct-current magnetron sputtering;Thin Solid Films;2021-12

4. Hard alloy films with enhanced resistance to cracking;Vacuum;2021-06

5. Design, Preparation and Properties of Ti-B-N Nanocomposite Coatings;ACTA METALL SIN;2020

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