Phase transition and microstructure change in Ta–Zr alloy films by co-sputtering-Reference-Cited by-同舟云学术

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Phase transition and microstructure change in Ta–Zr alloy films by co-sputtering

Published:2005-08 Issue:1-3 Volume:198 Page:110-113
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Tang Z.Z.,Hsieh J.H.,Zhang S.Y.,Li C.,Fu Y.Q.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference14 articles.

1. Study of Ta–Si–N thin films for use as barrier layer in copper metallizations

2. Growth and properties of LPCVD W–Si–N barrier layers

3. Evaluation of Ti–Si–N as a diffusion barrier between copper and silicon

4. Chemical and interface effects on glass forming ability under ion mixing in ZrTa system of positive heat of formation

5. Formation area of thin amorphous Zr-Mn and Zr-Ta films prepared by cocondensation

Cited by 22 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Phase transition and nanomechanical properties of refractory high-entropy alloy thin films: effects of co-sputtering Mo and W on a TiZrHfNbTa system;Nanoscale;2022

2. Structure and Properties of Ta–Zr Alloys Produced by High-Speed Quenching from a Liquid State;Russian Journal of Non-Ferrous Metals;2021-07

3. Structure and properties of Ta-Zr alloy obtained by high-speed melt quenching from liquid state;Izvestiya Vuzov. Tsvetnaya Metallurgiya (Universities' Proceedings Non-Ferrous Metallurgy);2021-06-13

4. Growth kinetics and origin of residual stress of two-phase crystalline–amorphous nanostructured films;Journal of Applied Physics;2021-04-14

5. Composition-driven transition from amorphous to crystalline films enables bottom-up design of functional surfaces;Applied Surface Science;2021-02

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