Experimental and theoretical investigations of ion current density distribution in PVD coating chamber-Reference-Cited by-同舟云学术

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Experimental and theoretical investigations of ion current density distribution in PVD coating chamber

Published:2005-10 Issue:1-4 Volume:200 Page:919-923
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Sobolyev O.,Mecke H.,Fischer W.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference8 articles.

1. M. Ellrodt. Doctoral Thesis: Einfluβ elektrischer parameter auf Vakuumbogenentladungen in PVD-Prozessen, Otto-von-Guericke-University Magdeburg, 1997.

2. Cathodic arc deposition;Martin,1995

3. Pulsed vacuum arc discharges on steered arc cathodes

4. Proceedings, Conference of Faculty of Electrical Engineering;Fuchs,1999

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