Stripping of carbon coatings in radio-frequency inductively coupled plasma of H2/Ar-Reference-Cited by-同舟云学术

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Stripping of carbon coatings in radio-frequency inductively coupled plasma of H2/Ar

Published:2021-12 Issue: Volume:427 Page:127837
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Sidelev Dmitrii V.,Ruchkin Sergey E.,Yurjev Yuriy N.,Lomygin Anton,Syrtanov Maxim S.,Stolbovskaya Galina N.,Ukhanov Sergey

Funder

Tomsk Polytechnic University

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference47 articles.

1. Comparative study of wear-resistant DLC and fullerene-like CNx coatings produced by pulsed laser and filtered cathodic arc depositions;Voevodin;Surf. Coat. Technol.,2005

2. Hybrid TiSiN, CrC/C PVD coatings applied to cutting tools;Henderer;Surf. Coat. Technol.,2013

3. Diamond-like coatings prepared by the filtered cathodic arc technique for minting application;Leu;Surf. Coat. Technol.,2004

4. Machining and machinability of aluminium cast alloys;König;CIRP Ann.,1983

5. Decorative black coatings on titanium surfaces based on hard bi-layered carbon coatings synthesized by carbon implantation;Gupta;Surf. Coat. Technol.,2019

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